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Applied Centura DPS Etch - DPS II for Silicon Applications
Enhancing Process Control Flexibility for Sub-90nm Applications, Fabtech 25th Addition, February 2005 (1.80MB)
Advanced Etch Applications Using Tool-Level Data, Solid State Technology, June 2004 (127KB)
Developing a WSix Gate Etch Process with CD Bias Uniformity less than 3nm, Future Fab, February 2004 (2.66MB)
Applied Centura DPS Etch - DPS Plus for Metal Applications
No Technical Articles/Papers at this time.
Applied Centura DPS Etch - DPS Plus for Silicon Applications
No Technical Articles/Papers at this time.
Applied Centura eMAX Dielectric Etch
No Technical Articles/Papers at this time.
Physics and Process Drive Etch Performance at 45nm, Solid State Technology, March 2005 (330KB)
No Technical Articles/Papers at this time.
Applied Centura Transforma Silicon Etch
Enhancing Process Control Flexibility for Sub-90nm Applications, Semiconductor Fabtech 25th Addition, February 2005 (1.80MB)
Advanced Etch Applications Using Tool-Level Data, Solid State Technology, June 2004 (127KB)
Applied Producer Dielectric Etch
No Technical Articles/Papers at this time.
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